<http://webisa.webdatacommons.org/prov/487660927>	<http://www.w3.org/ns/prov#wasDerivedFrom>	<http://webisa.webdatacommons.org/243994992> .
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<http://webisa.webdatacommons.org/243994992>	<http://www.w3.org/ns/prov#value>	"Patent US5892235 - Apparatus and method for doping - Google PatentsSearch Images Maps Play YouTube News Gmail Drive More ??Sign inAdvanced Patent SearchPatentsAn apparatus for doping a material includes an ion current which is particularly suitable for processing a substrate having a large area." .
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