<http://webisa.webdatacommons.org/257716885>	<http://www.w3.org/ns/prov#value>	"FIG. 1 is a schematic cross section of an interconnect trench and via structured in accordance with the invention." .
<http://webisa.webdatacommons.org/prov/232693090>	<http://www.w3.org/ns/prov#wasDerivedFrom>	<http://webisa.webdatacommons.org/257716885> .
<http://webisa.webdatacommons.org/257716885>	<http://www.w3.org/1999/02/22-rdf-syntax-ns#type>	<http://www.w3.org/ns/prov#Entity> .
<http://webisa.webdatacommons.org/257716885>	<http://www.w3.org/ns/prov#wasQuotedFrom>	<google.com> .