<http://webisa.webdatacommons.org/267258196>	<http://www.w3.org/ns/prov#wasQuotedFrom>	<google.com> .
<http://webisa.webdatacommons.org/267258196>	<http://www.w3.org/ns/prov#value>	"ng Cu on said at least one of said trench and said contact hole to form a conductive film; heat-treating said conductive film in an atmosphere with a reduced pressure, the atmosphere including at least an oxygen gas as an oxidizing gas and a hydrogen gas as a reducing gas to cause an exothermic region so that said conductive film flows and fills said at least one of said trench and said contact ho" .
<http://webisa.webdatacommons.org/prov/237989683>	<http://www.w3.org/ns/prov#wasDerivedFrom>	<http://webisa.webdatacommons.org/267258196> .
<http://webisa.webdatacommons.org/267258196>	<http://www.w3.org/1999/02/22-rdf-syntax-ns#type>	<http://www.w3.org/ns/prov#Entity> .