<http://webisa.webdatacommons.org/269487946>	<http://www.w3.org/ns/prov#value>	"Metal such as aluminum (Al) is deposited on the glass substrate 801b with the electron beam (EB) depositing method." .
<http://webisa.webdatacommons.org/prov/464641368>	<http://www.w3.org/ns/prov#wasDerivedFrom>	<http://webisa.webdatacommons.org/269487946> .
<http://webisa.webdatacommons.org/269487946>	<http://www.w3.org/ns/prov#wasQuotedFrom>	<google.com> .
<http://webisa.webdatacommons.org/269487946>	<http://www.w3.org/1999/02/22-rdf-syntax-ns#type>	<http://www.w3.org/ns/prov#Entity> .