<http://webisa.webdatacommons.org/276359869>	<http://www.w3.org/ns/prov#wasQuotedFrom>	<google.com> .
<http://webisa.webdatacommons.org/276359869>	<http://www.w3.org/ns/prov#value>	"The electromechanical conformal grating device claimed in claim 1, wherein the force is an electrostatic force." .
<http://webisa.webdatacommons.org/prov/367922703>	<http://www.w3.org/ns/prov#wasDerivedFrom>	<http://webisa.webdatacommons.org/276359869> .
<http://webisa.webdatacommons.org/276359869>	<http://www.w3.org/1999/02/22-rdf-syntax-ns#type>	<http://www.w3.org/ns/prov#Entity> .