<http://webisa.webdatacommons.org/281408526>	<http://www.w3.org/ns/prov#value>	"The temperature controlled gases delivered to the processing chamber 106 may be a process gas, purge gas, cleaning gas, or other gas." .
<http://webisa.webdatacommons.org/prov/281611085>	<http://www.w3.org/ns/prov#wasDerivedFrom>	<http://webisa.webdatacommons.org/281408526> .
<http://webisa.webdatacommons.org/281408526>	<http://www.w3.org/ns/prov#wasQuotedFrom>	<google.com> .
<http://webisa.webdatacommons.org/281408526>	<http://www.w3.org/1999/02/22-rdf-syntax-ns#type>	<http://www.w3.org/ns/prov#Entity> .