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<http://webisa.webdatacommons.org/284601089>	<http://www.w3.org/ns/prov#value>	"l formula MOR and titanate compounds of a second general formula MTiO3 and M2TiO5, where M is an alkali or alkaline earth metal, and ferroelectric compounds, to form a relatively high dielectric constant silicon oxide film. 2." .
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