<http://webisa.webdatacommons.org/31673972>	<http://www.w3.org/ns/prov#value>	"ch other, while continuously applying film-f forming solution, in the form of a slender stream, to the surface of a substrate, thereby to form a film on the substrate.With this method it is possible to apply solution, such as resist solution, in a manner of so-called single-stroke writing." .
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