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<http://webisa.webdatacommons.org/325876278>	<http://www.w3.org/ns/prov#wasQuotedFrom>	<google.ca> .
<http://webisa.webdatacommons.org/325876278>	<http://www.w3.org/ns/prov#value>	"First amorphous silicon layer 18 has been formed and doped to a concentration of between about 1???1018 and 1???1020 atoms/cm3 with a species selected from the group including phosphorous, boron, arsenic, and antimony." .
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