<http://webisa.webdatacommons.org/337803636>	<http://www.w3.org/ns/prov#value>	"Yet further, the method for manufacturing a semiconductor chip of claim 15 in accordance with claim 8 is characterized in that the semiconductor chip is a chip having a planar transistor." .
<http://webisa.webdatacommons.org/337803636>	<http://www.w3.org/ns/prov#wasQuotedFrom>	<google.ca> .
<http://webisa.webdatacommons.org/prov/172013112>	<http://www.w3.org/ns/prov#wasDerivedFrom>	<http://webisa.webdatacommons.org/337803636> .
<http://webisa.webdatacommons.org/337803636>	<http://www.w3.org/1999/02/22-rdf-syntax-ns#type>	<http://www.w3.org/ns/prov#Entity> .