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<http://webisa.webdatacommons.org/380678110>	<http://www.w3.org/ns/prov#value>	"Patent US4907064 - Semiconductor device having silicon oxynitride film with improved moisture ... - Google PatentsSearch Images Maps Play YouTube News Gmail Drive More ??Sign inAdvanced Patent SearchPatentsDisclosed herein is a semiconductor device having an aluminum wiring formed on a semiconductor substrate and a silicon oxynitride film covering the aluminum wiring and having Si, N, O as main el" .
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