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<http://webisa.webdatacommons.org/prov/392805353>	<http://www.w3.org/ns/prov#wasDerivedFrom>	<http://webisa.webdatacommons.org/385632514> .
<http://webisa.webdatacommons.org/385632514>	<http://www.w3.org/ns/prov#wasQuotedFrom>	<google.es> .
<http://webisa.webdatacommons.org/385632514>	<http://www.w3.org/ns/prov#value>	"The semiconductor device according to claim 2, wherein said sensor is an acceleration sensor; and wherein said acceleration sensor is formed in said MEMS process. 16." .