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<http://webisa.webdatacommons.org/395354624>	<http://www.w3.org/ns/prov#value>	"The included field solvers provide comprehensive coverage of MEMS-specific multi-physics, such as electrostatics, coupled electro-mechanics, piezoelectric, piezoresistive, and damping effects." .
<http://webisa.webdatacommons.org/395354624>	<http://www.w3.org/1999/02/22-rdf-syntax-ns#type>	<http://www.w3.org/ns/prov#Entity> .
<http://webisa.webdatacommons.org/395354624>	<http://www.w3.org/ns/prov#wasQuotedFrom>	<coventor.com> .