<http://webisa.webdatacommons.org/418003168>	<http://www.w3.org/1999/02/22-rdf-syntax-ns#type>	<http://www.w3.org/ns/prov#Entity> .
<http://webisa.webdatacommons.org/prov/30354349>	<http://www.w3.org/ns/prov#wasDerivedFrom>	<http://webisa.webdatacommons.org/418003168> .
<http://webisa.webdatacommons.org/418003168>	<http://www.w3.org/ns/prov#wasQuotedFrom>	<freepatentsonline.com> .
<http://webisa.webdatacommons.org/418003168>	<http://www.w3.org/ns/prov#value>	"After evacuation, the disc can be cleaned by any suitable means provided in the loading chamber, for example means causing glow discharge, DC sputter etching or RF sputter etching." .