<http://webisa.webdatacommons.org/42238844>	<http://www.w3.org/ns/prov#wasQuotedFrom>	<google.com> .
<http://webisa.webdatacommons.org/prov/241376752>	<http://www.w3.org/ns/prov#wasDerivedFrom>	<http://webisa.webdatacommons.org/42238844> .
<http://webisa.webdatacommons.org/42238844>	<http://www.w3.org/1999/02/22-rdf-syntax-ns#type>	<http://www.w3.org/ns/prov#Entity> .
<http://webisa.webdatacommons.org/42238844>	<http://www.w3.org/ns/prov#value>	"Subsequently, if energy for reaction is supplied, such as by a dilute gas, a polycrystalline film will be formed in the as- deposited state." .