<http://webisa.webdatacommons.org/prov/21578902>	<http://www.w3.org/ns/prov#wasDerivedFrom>	<http://webisa.webdatacommons.org/422417378> .
<http://webisa.webdatacommons.org/422417378>	<http://www.w3.org/ns/prov#wasQuotedFrom>	<google.es> .
<http://webisa.webdatacommons.org/422417378>	<http://www.w3.org/ns/prov#value>	"Multiple transducers, including a combination of actuators and sensors, can be combined together in a microelectromechanical system (MEMS)." .
<http://webisa.webdatacommons.org/422417378>	<http://www.w3.org/1999/02/22-rdf-syntax-ns#type>	<http://www.w3.org/ns/prov#Entity> .