<http://webisa.webdatacommons.org/prov/100107442>	<http://www.w3.org/ns/prov#wasDerivedFrom>	<http://webisa.webdatacommons.org/429765502> .
<http://webisa.webdatacommons.org/429765502>	<http://www.w3.org/ns/prov#wasQuotedFrom>	<google.com> .
<http://webisa.webdatacommons.org/429765502>	<http://www.w3.org/1999/02/22-rdf-syntax-ns#type>	<http://www.w3.org/ns/prov#Entity> .
<http://webisa.webdatacommons.org/429765502>	<http://www.w3.org/ns/prov#value>	"According to this aspect, as the insulation portion including the dense silicon nitride film or silicon nitride oxide film is formed to have the multiple-layered structure, the capability of shielding the oxidizers such as oxygen, moisture and the like at the insulation portion can be improved." .