<http://webisa.webdatacommons.org/434074976>	<http://www.w3.org/ns/prov#wasQuotedFrom>	<patentgenius.com> .
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<http://webisa.webdatacommons.org/prov/101106031>	<http://www.w3.org/ns/prov#wasDerivedFrom>	<http://webisa.webdatacommons.org/434074976> .
<http://webisa.webdatacommons.org/434074976>	<http://www.w3.org/ns/prov#value>	"Since the positioning mechanism is mounted inside the substrate susceptor 1supplied with a high-frequency voltage, it is made of an insulating material such as quartz, alumina or resin to prevent abnormal electric discharge." .