<http://webisa.webdatacommons.org/52085423>	<http://www.w3.org/1999/02/22-rdf-syntax-ns#type>	<http://www.w3.org/ns/prov#Entity> .
<http://webisa.webdatacommons.org/52085423>	<http://www.w3.org/ns/prov#wasQuotedFrom>	<google.com> .
<http://webisa.webdatacommons.org/52085423>	<http://www.w3.org/ns/prov#value>	"(3) The method of (c) has a problem that an electric property (carrier mobility etc.) of the crystal film deteriorates, caused by such impurity as oxygen." .
<http://webisa.webdatacommons.org/prov/105929485>	<http://www.w3.org/ns/prov#wasDerivedFrom>	<http://webisa.webdatacommons.org/52085423> .