<http://webisa.webdatacommons.org/59986940>	<http://www.w3.org/ns/prov#value>	"Then, a metallic film (not shown) which essentially consists of aluminum is formed and the original forms of gate electrodes to be described later are formed by patterning." .
<http://webisa.webdatacommons.org/prov/184696392>	<http://www.w3.org/ns/prov#wasDerivedFrom>	<http://webisa.webdatacommons.org/59986940> .
<http://webisa.webdatacommons.org/59986940>	<http://www.w3.org/1999/02/22-rdf-syntax-ns#type>	<http://www.w3.org/ns/prov#Entity> .
<http://webisa.webdatacommons.org/59986940>	<http://www.w3.org/ns/prov#wasQuotedFrom>	<google.com> .