<http://webisa.webdatacommons.org/66003528>	<http://www.w3.org/ns/prov#wasQuotedFrom>	<google.com> .
<http://webisa.webdatacommons.org/66003528>	<http://www.w3.org/1999/02/22-rdf-syntax-ns#type>	<http://www.w3.org/ns/prov#Entity> .
<http://webisa.webdatacommons.org/66003528>	<http://www.w3.org/ns/prov#value>	"The present invention relates generally to semiconductor materials, and more particularly to semiconductor-on-insulator substrates with a recess-resistant layer." .
<http://webisa.webdatacommons.org/prov/410246764>	<http://www.w3.org/ns/prov#wasDerivedFrom>	<http://webisa.webdatacommons.org/66003528> .