<http://webisa.webdatacommons.org/76221543>	<http://www.w3.org/ns/prov#value>	"In the wafer boat 58 of this embodiment, circular film thickness equalization plates 60 made of a material such as quartz are supported by grooves 12 formed at equal pitch in the three support columns 2 and are fixed integrally to each of the support columns 2 by fusing 62 (see FIG. 10)." .
<http://webisa.webdatacommons.org/prov/101106031>	<http://www.w3.org/ns/prov#wasDerivedFrom>	<http://webisa.webdatacommons.org/76221543> .
<http://webisa.webdatacommons.org/76221543>	<http://www.w3.org/ns/prov#wasQuotedFrom>	<google.com> .
<http://webisa.webdatacommons.org/76221543>	<http://www.w3.org/1999/02/22-rdf-syntax-ns#type>	<http://www.w3.org/ns/prov#Entity> .