<http://webisa.webdatacommons.org/prov/396589647>	<http://www.w3.org/ns/prov#wasDerivedFrom>	<http://webisa.webdatacommons.org/85408273> .
<http://webisa.webdatacommons.org/85408273>	<http://www.w3.org/1999/02/22-rdf-syntax-ns#type>	<http://www.w3.org/ns/prov#Entity> .
<http://webisa.webdatacommons.org/85408273>	<http://www.w3.org/ns/prov#wasQuotedFrom>	<google.com> .
<http://webisa.webdatacommons.org/85408273>	<http://www.w3.org/ns/prov#value>	"The invention relates to a method for making a semiconductor device and more particularly to making a semiconductor device using a metal oxide." .