<http://webisa.webdatacommons.org/85845255>	<http://www.w3.org/ns/prov#value>	"The present invention is a method for determining the end point of a plasma process that uses an increase in a value of a flow of backside gas." .
<http://webisa.webdatacommons.org/85845255>	<http://www.w3.org/1999/02/22-rdf-syntax-ns#type>	<http://www.w3.org/ns/prov#Entity> .
<http://webisa.webdatacommons.org/85845255>	<http://www.w3.org/ns/prov#wasQuotedFrom>	<google.com> .
<http://webisa.webdatacommons.org/prov/137300572>	<http://www.w3.org/ns/prov#wasDerivedFrom>	<http://webisa.webdatacommons.org/85845255> .