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PrefixNamespace IRI
n4google.
isaphttp://webisa.webdatacommons.org/prov/
isahttp://webisa.webdatacommons.org/
rdfhttp://www.w3.org/1999/02/22-rdf-syntax-ns#
provhttp://www.w3.org/ns/prov#
xsdhhttp://www.w3.org/2001/XMLSchema#
Subject Item
isa:66741417
rdf:type
prov:Entity
prov:value
According to the present invention, a substrate (semiconductor wafer, liquid crystal substrate or the like) means a substrate itself and a substrate including layers or a layer of other materials such as a metal layer and semiconductor layer.
prov:wasQuotedFrom
n4:ca
Subject Item
isap:336237954
prov:wasDerivedFrom
isa:66741417