<http://webisa.webdatacommons.org/146542118>	<http://www.w3.org/ns/prov#wasQuotedFrom>	<google.com> .
<http://webisa.webdatacommons.org/146542118>	<http://www.w3.org/ns/prov#value>	"However, in the formation of the MOSFET with fine dimensions such as 0.18 ??m rule, it is necessary to add impurities of about 1???1018 atoms/cm3." .
<http://webisa.webdatacommons.org/prov/299585728>	<http://www.w3.org/ns/prov#wasDerivedFrom>	<http://webisa.webdatacommons.org/146542118> .
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