<http://webisa.webdatacommons.org/151773557>	<http://www.w3.org/ns/prov#value>	"An apparatus for depositing two or more PVD seed layers over a substrate, the substrate including a patterned insulating layer which comprises at least one opening surrounded by a field, the at least one opening having sidewalls, top corners, and bottom, and the apparatus comprising:" .
<http://webisa.webdatacommons.org/prov/336237954>	<http://www.w3.org/ns/prov#wasDerivedFrom>	<http://webisa.webdatacommons.org/151773557> .
<http://webisa.webdatacommons.org/151773557>	<http://www.w3.org/ns/prov#wasQuotedFrom>	<google.ca> .
<http://webisa.webdatacommons.org/151773557>	<http://www.w3.org/1999/02/22-rdf-syntax-ns#type>	<http://www.w3.org/ns/prov#Entity> .