<http://webisa.webdatacommons.org/prov/449998991>	<http://www.w3.org/ns/prov#wasDerivedFrom>	<http://webisa.webdatacommons.org/211353510> .
<http://webisa.webdatacommons.org/211353510>	<http://www.w3.org/ns/prov#wasQuotedFrom>	<freepatentsonline.com> .
<http://webisa.webdatacommons.org/211353510>	<http://www.w3.org/1999/02/22-rdf-syntax-ns#type>	<http://www.w3.org/ns/prov#Entity> .
<http://webisa.webdatacommons.org/211353510>	<http://www.w3.org/ns/prov#value>	"Thickness of the rigid substrate 1 is in the range of 10 to 150 ??m and, particularly preferably, 25 to 130 ??m." .