<http://webisa.webdatacommons.org/288616851>	<http://www.w3.org/1999/02/22-rdf-syntax-ns#type>	<http://www.w3.org/ns/prov#Entity> .
<http://webisa.webdatacommons.org/288616851>	<http://www.w3.org/ns/prov#value>	"FIG. 6 is a development of an outer peripheral surface of the substrate rotating apparatus according to the embodiment of the present invention." .
<http://webisa.webdatacommons.org/288616851>	<http://www.w3.org/ns/prov#wasQuotedFrom>	<google.com> .
<http://webisa.webdatacommons.org/prov/111669445>	<http://www.w3.org/ns/prov#wasDerivedFrom>	<http://webisa.webdatacommons.org/288616851> .