<http://webisa.webdatacommons.org/38364043>	<http://www.w3.org/ns/prov#value>	"The substrate is put in an ambient atmosphere containing hydrogen chloride diluted by oxygen by 10% and visible or near infrared radiation of which wavelength is mainly from 0.8 to 1.4 ??m is irradiated on the substrate." .
<http://webisa.webdatacommons.org/prov/328307732>	<http://www.w3.org/ns/prov#wasDerivedFrom>	<http://webisa.webdatacommons.org/38364043> .
<http://webisa.webdatacommons.org/38364043>	<http://www.w3.org/ns/prov#wasQuotedFrom>	<google.es> .
<http://webisa.webdatacommons.org/38364043>	<http://www.w3.org/1999/02/22-rdf-syntax-ns#type>	<http://www.w3.org/ns/prov#Entity> .