<http://webisa.webdatacommons.org/98456512>	<http://www.w3.org/ns/prov#value>	"The mechanical structures can be formed in or from single crystal silicon or other substrate and in or from a single wafer." .
<http://webisa.webdatacommons.org/98456512>	<http://www.w3.org/1999/02/22-rdf-syntax-ns#type>	<http://www.w3.org/ns/prov#Entity> .
<http://webisa.webdatacommons.org/98456512>	<http://www.w3.org/ns/prov#wasQuotedFrom>	<google.fr> .
<http://webisa.webdatacommons.org/prov/319385276>	<http://www.w3.org/ns/prov#wasDerivedFrom>	<http://webisa.webdatacommons.org/98456512> .