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PrefixNamespace IRI
n5google.
isaphttp://webisa.webdatacommons.org/prov/
isahttp://webisa.webdatacommons.org/
rdfhttp://www.w3.org/1999/02/22-rdf-syntax-ns#
provhttp://www.w3.org/ns/prov#
xsdhhttp://www.w3.org/2001/XMLSchema#
Subject Item
isa:15808688
rdf:type
prov:Entity
prov:value
The RF sputter clean improves contact resistance between the barrier layer and the pad limiting metal layer 62 by removing uppermost portions of the conductive barrier layer 32 that can contain impurities, such as oxygen, carbon, fluorine, and chlorine.
prov:wasQuotedFrom
n5:com
Subject Item
isap:105929485
prov:wasDerivedFrom
isa:15808688