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<http://webisa.webdatacommons.org/prov/435749878>	<http://www.w3.org/ns/prov#wasDerivedFrom>	<http://webisa.webdatacommons.org/248148700> .
<http://webisa.webdatacommons.org/248148700>	<http://www.w3.org/ns/prov#value>	" than the active patterns, is removed so that the gate insulation layer 430 planarizes an upper surface of the substrate 410 including a stepped portion formed by the active pattern." .
<http://webisa.webdatacommons.org/248148700>	<http://www.w3.org/ns/prov#wasQuotedFrom>	<google.com> .