<http://webisa.webdatacommons.org/prov/249871569>	<http://www.w3.org/ns/prov#wasDerivedFrom>	<http://webisa.webdatacommons.org/248809901> .
<http://webisa.webdatacommons.org/248809901>	<http://www.w3.org/ns/prov#value>	"FIG. 7 is a plan view showing a resist coating and developing processing system according to another embodiment of the present invention;" .
<http://webisa.webdatacommons.org/248809901>	<http://www.w3.org/1999/02/22-rdf-syntax-ns#type>	<http://www.w3.org/ns/prov#Entity> .
<http://webisa.webdatacommons.org/248809901>	<http://www.w3.org/ns/prov#wasQuotedFrom>	<google.com> .