This HTML5 document contains 5 embedded RDF statements represented using HTML+Microdata notation.

The embedded RDF content will be recognized by any processor of HTML5 Microdata.

PrefixNamespace IRI
n5google.
isaphttp://webisa.webdatacommons.org/prov/
isahttp://webisa.webdatacommons.org/
rdfhttp://www.w3.org/1999/02/22-rdf-syntax-ns#
provhttp://www.w3.org/ns/prov#
xsdhhttp://www.w3.org/2001/XMLSchema#
Subject Item
isa:262992811
rdf:type
prov:Entity
prov:value
Field of the Invention [0002] The present invention relates to a semiconductor. device and a manufacturing method thereof and more particularly to a semiconductor device at high integration degree and of high speed operation, and a manufacturing method thereof. [0003] 2.
prov:wasQuotedFrom
n5:com
Subject Item
isap:385267106
prov:wasDerivedFrom
isa:262992811
Subject Item
isap:396589647
prov:wasDerivedFrom
isa:262992811