This HTML5 document contains 5 embedded RDF statements represented using HTML+Microdata notation.

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PrefixNamespace IRI
n4google.
isaphttp://webisa.webdatacommons.org/prov/
isahttp://webisa.webdatacommons.org/
rdfhttp://www.w3.org/1999/02/22-rdf-syntax-ns#
provhttp://www.w3.org/ns/prov#
xsdhhttp://www.w3.org/2001/XMLSchema#
Subject Item
isa:318182690
rdf:type
prov:Entity
prov:value
-layer substrateUS6860798Aug 8, 2002Mar 1, 2005Micron Technology, Inc.Carrier assemblies, planarizing apparatuses including carrier assemblies, and methods for planarizing micro-device workpiecesUS6864169Sep 4, 2002Mar 8, 2005Renesas Technology Corp.Semiconductor integrated circuit device and manufacturing method of semiconductor integrated circuit deviceUS6866566Aug 24, 2001Mar 15, 2005Micron Tec
prov:wasQuotedFrom
n4:com
Subject Item
isap:421373531
prov:wasDerivedFrom
isa:318182690
Subject Item
isap:448318246
prov:wasDerivedFrom
isa:318182690