<http://webisa.webdatacommons.org/381567461>	<http://www.w3.org/1999/02/22-rdf-syntax-ns#type>	<http://www.w3.org/ns/prov#Entity> .
<http://webisa.webdatacommons.org/381567461>	<http://www.w3.org/ns/prov#wasQuotedFrom>	<google.com> .
<http://webisa.webdatacommons.org/381567461>	<http://www.w3.org/ns/prov#value>	"Vias 506, which can be created using suitable semiconductor device fabrication techniques, may be formed using any suitable conductive metal such as copper." .
<http://webisa.webdatacommons.org/prov/122776901>	<http://www.w3.org/ns/prov#wasDerivedFrom>	<http://webisa.webdatacommons.org/381567461> .