<http://webisa.webdatacommons.org/400130022>	<http://www.w3.org/1999/02/22-rdf-syntax-ns#type>	<http://www.w3.org/ns/prov#Entity> .
<http://webisa.webdatacommons.org/400130022>	<http://www.w3.org/ns/prov#wasQuotedFrom>	<google.fr> .
<http://webisa.webdatacommons.org/400130022>	<http://www.w3.org/ns/prov#value>	"FIG. 3 is a plan view showing a pattern of contact spaces and slots formed during the iterative self-aligned contact metallization process according to the invention." .
<http://webisa.webdatacommons.org/prov/249871565>	<http://www.w3.org/ns/prov#wasDerivedFrom>	<http://webisa.webdatacommons.org/400130022> .