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<http://webisa.webdatacommons.org/441310059>	<http://www.w3.org/ns/prov#wasQuotedFrom>	<patents.com> .
<http://webisa.webdatacommons.org/prov/192222444>	<http://www.w3.org/ns/prov#wasDerivedFrom>	<http://webisa.webdatacommons.org/441310059> .
<http://webisa.webdatacommons.org/441310059>	<http://www.w3.org/ns/prov#value>	"using technique such as sputtering, e-beam evaporation, chemical vapor" .