<http://webisa.webdatacommons.org/451691798>	<http://www.w3.org/ns/prov#wasQuotedFrom>	<google.com> .
<http://webisa.webdatacommons.org/451691798>	<http://www.w3.org/1999/02/22-rdf-syntax-ns#type>	<http://www.w3.org/ns/prov#Entity> .
<http://webisa.webdatacommons.org/451691798>	<http://www.w3.org/ns/prov#value>	"Such merits are great advantages as compared with a case of using a circular silicon substrate." .
<http://webisa.webdatacommons.org/prov/288066132>	<http://www.w3.org/ns/prov#wasDerivedFrom>	<http://webisa.webdatacommons.org/451691798> .