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PrefixNamespace IRI
n4google.
isaphttp://webisa.webdatacommons.org/prov/
isahttp://webisa.webdatacommons.org/
rdfhttp://www.w3.org/1999/02/22-rdf-syntax-ns#
provhttp://www.w3.org/ns/prov#
xsdhhttp://www.w3.org/2001/XMLSchema#
Subject Item
isa:84300610
rdf:type
prov:Entity
prov:value
for cleaning a web-based chemical mechanical planarization systemUS715319120 Ago 200426 Dic 2006Micron Technology, Inc.Polishing liquids for activating and/or conditioning fixed abrasive polishing pads, and associated systems and methodsUS71891531 Ago 200513 Mar 2007Micron Technology, Inc.Retaining rings, planarizing apparatuses including retaining rings, and methods for planarizing micro-device w
prov:wasQuotedFrom
n4:es
Subject Item
isap:290342738
prov:wasDerivedFrom
isa:84300610