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  • ving material from microelectronic substratesUS7220166Aug 29, 2002May 22, 2007Micron Technology, Inc.Methods and apparatus for electromechanically and/or electrochemically-mechanically removing conductive material from a microelectronic substrateUS7247223Apr 28, 2003Jul 24, 2007Semitool, Inc.Method and apparatus for controlling vessel characteristics, including shape and thieving current for proce
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