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  • C. or less), and the process supplemented in order to incorporate thecapacitor will not deteriorate the integrated circuit.Embodiment 2In FIGS. 3, 4 and 5, transistors and other circuit elements for composing the integrated circuits are formed on a silicon substrate 31 aside from the capacitor, but the transistors and other parts not related directly with the explanation ofEmbodiment 2 and its mod
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