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An Entity of Type : prov:Entity, within Data Space : webisa.webdatacommons.org associated with source dataset(s)

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  • onductor processingUS6645302 *Apr 26, 2001Nov 11, 2003Showa Denko Kabushiki KaishaVapor phase deposition systemUS7338901 *Aug 19, 2005Mar 4, 2008Tokyo Electron LimitedMethod of preparing a film layer-by-layer using plasma enhanced atomic layer depositionUS7491430 *Jul 14, 2005Feb 17, 2009Tokyo Electron LimitedDeposition method for forming a film including metal, nitrogen and carbonUS20040038525 *A
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