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  • osition of silicon-containing filmsUS7910765Jul 17, 2010Mar 22, 2011Advanced Technology Materials, Inc.Composition and method for low temperature deposition of silicon-containing films such as films including silicon, silicon nitride, silicon dioxide and/or silicon-oxynitrideUS8114219Feb 26, 2010Feb 14, 2012Micron Technology, Inc.Systems and methods for forming metal oxide layersUS8153833Mar 22, 2
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