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An Entity of Type : prov:Entity, within Data Space : webisa.webdatacommons.org associated with source dataset(s)

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  • IV semiconductor alloy upon said body of semiconductor :material of a first conductivity type, by a microwave energized glow discharge deposition process comprising:a. providing a deposition system having a plasma region defined therein, said system including a conduit for introducing a process gas there into and a source of of microwave energy for activating said process gas in said plasma region
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