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An Entity of Type : prov:Entity, within Data Space : webisa.webdatacommons.org associated with source dataset(s)

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  • In this case, a chip-to-chip comparison is performed, that is, chips of the same specifications on the same (or different) wafer are compared with each other, and a portion where there is a discrepancy between the two patterns or the like is deemed as a defect.
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