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An Entity of Type : prov:Entity, within Data Space : webisa.webdatacommons.org associated with source dataset(s)

AttributesValues
rdf:type
prov:value
  • 100 sccm and about 1,000 sccm, such as between about 100 sccm and about 700 sccm, maintaining the chamber pressure less than about 120 Torr, such as between about 1 Torr and about 50 Torr, for example, between about 1 Torr and about 5 Torr, and maintaining the heater temperature between about 100??? C. and about 600??? C., such as between 175??? C. and about 350??? C., for example 300??? C. It is
prov:wasQuotedFrom
is prov:wasDerivedFrom of
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