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  • Ordinarily, the bottom electrode 120 is from about 30-100 nm thick and comprised of one or more layers of noble metal or conductive oxide such as iridium, iridium oxide, Pt, Pd, PdOx, Au, Ru, RuOx, Rh, RhOx, IrPt alloys, (Ba,Sr,Pb)RuO3, (Sr,Ba,Pb)IrO3, RLaSrCoO3, (Ba,Sr)RuO3, LaNiO3.
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