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An Entity of Type : prov:Entity, within Data Space : webisa.webdatacommons.org associated with source dataset(s)

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  • Information such as the lot number of a wafer to be inspected by an inspection apparatus 171???1 and the history of production apparatus involved in production can be read from a memory provided in an SMIF or FOUP 171???2, or the lot number can be recognized by reading ID number of the SMIF, FOUP or wafer cassette.
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